Ladislav Bardos - Microwave Plasma Sources and Methods in Processing Technology

Chapter 4focuses on different microwave plasma systems, including novel and non-conventional ones developed and laboratory tested in different processing applications at reduced pressures. Chapter 5is devoted to the microwave plasma systems at atmospheric and higher pressures, including plasmas inside liquids and plasma interactions with the combustion flames. Chapter 6describes some new applications and trends in microwave plasmas, with short opinions and expectations on future perspectives of the microwave plasma and its applications. Chapter 7contains appendices with description of symbols, abbreviations, units and values used in the individual chapters.

As mentioned, this book has no ambition to become a “handbook” or a “textbook”. We have written an “easy” text to inspire the readers and raise their interest in further studies and designs of novel systems, as well as to help readers in their experimental works with the microwave plasma and the microwave plasma-assisted applications.

1 [1] D. M. Pozar: “Microwave engineering”, 2nd Ed., John Wiley & Sons Inc., New York, 1996.

2 [2] J. C. Slater: “Microwave electronics”, D. Van Nostrand Company Inc., New York, 1951.

3 [3] T. Moreno: “Microwave transmission design data”, Artech House Microwave Library, Boston, MA, 1989. ISBN 089006346X, 9780890063460.

4 [4] L.S. Polak and Yu.A. Lebedev, eds.: “Plasma Chemistry”, Cambridge International Science Publishing, Cambridge, UK, 1998. ISBN 1898326223, 9781898326229.

5 [5] M. Moisan and J. Pelletier, eds.: “Microwave Excited Plasmas Vol. 4”, 1st Ed., Elsevier Science, Amsterdam, Netherlands, 1992.

6 [6] Yu.A. Lebedev, ed.: “Microwave discharges: fundamentals and applications”, Yanus-K, Moscow, 2001. ISBN 5-8037-0066–5.

7 [7] O.A. Popov, ed.: “High density plasma sources”, Noyes Publications, Park Ridge, NJ, 1995. ISBN 0-8155-1377–1.

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